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  1. Ivoryton Press - Atomic Layer Deposition

    Atomic Layer Deposition for Nanotechnology, is a monograph describing how to grow ultra thin films from vapors by a surface chemical process. It covers growth ...
    nanotechnology2
    metals2
    semiconductors2
    Sherman2
    CVD1
    ALD1
    thin film deposition1
    chemical vapor deposition1
    dielectrics1
    conformal coatings1
    atomic layer deposition1
    plasma enhanced1
    Arthur Sherman0
    Ivoryton Press0
    multilayer thin films0
    radical enhanced0

    www.ivorytonpress.com - 2009-02-12

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